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Hydrocarbon impurities in SiF4 and SiH4 prepared from it

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Abstract

Using gas chromatography and high-resolution Fourier-transform IR spectroscopy, we have determined the concentrations of C1–C4 hydrocarbon impurities in isotopically unmodified silicon tetrafluoride before and after fine purification and in 28Si-enriched SiF4. The concentrations of C1–C4 hydrocarbon impurities in silicon tetrafluoride for SiH4 synthesis have been shown to correlate with those in the synthesized silane.

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Authors and Affiliations

  1. Institute of Chemistry of High-Purity Substances, Russian Academy of Sciences, ul. Tropinina 49, Nizhni Novgorod, 603950, Russia

    A. D. Bulanov, P. G. Sennikov, V. A. Krylov, T. G. Sorochkina, L. A. Chuprov, O. Yu. Chernova & O. Yu. Troshin

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  1. A. D. Bulanov
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  2. P. G. Sennikov
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  3. V. A. Krylov
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  4. T. G. Sorochkina
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  5. L. A. Chuprov
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  6. O. Yu. Chernova
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  7. O. Yu. Troshin
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Original Russian Text © A.D. Bulanov, P.G. Sennikov, V.A. Krylov, T.G. Sorochkina, L.A. Chuprov, O.Yu. Chernova, O.Yu. Troshin, 2007, published in Neorganicheskie Materialy, 2007, Vol. 43, No. 4, pp. 427–431.

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Bulanov, A.D., Sennikov, P.G., Krylov, V.A. et al. Hydrocarbon impurities in SiF4 and SiH4 prepared from it. Inorg Mater 43, 364–368 (2007). https://doi.org/10.1134/S0020168507040061

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  • DOI: https://doi.org/10.1134/S0020168507040061

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