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Effect of Mixture Composition on Electrophysical Parameters and Emission Spectra of Dichlorodifluoromethane Plasma with Oxygen and Helium

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Abstract

The influence of the mixture composition on the electrophysical parameters and emission spectra of direct-current glow discharge plasma of dichlorodifluoromethane mixed with oxygen or helium has been analyzed. Data on the gas temperature and reduced electric field strength have been obtained. It has been found that the reduced electric field strength decreases linearly with an increase in the proportion of the second gas in the mixture. It has been shown that the relative intensity of atomic chlorine passes through a maximum at an oxygen fraction of 0.5 in the mixture and there is a less pronounced maximum at a helium fraction of 0.2.

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REFERENCES

  1. Sitanov, D.V. and Pivovarenok, S.A., High Energy Chem., 2017, vol. 51, no. 4, p. 292.

    Article  CAS  Google Scholar 

  2. Pivovarenok, S.A., Dunaev, A.V., Efremov, A.M., et al., Nanotekhnika, 2011, no. 1.

  3. Murin, D.B., Efremov, A.M., Svettsov, V.I., et al., Izv. Vyssh. Uchebn. Zaved., Khim. Khim. Tekhnol., 2013, vol. 56, no. 8, p. 41.

    CAS  Google Scholar 

  4. Murin, D.B., Efremov, A.M., Svettsov, V.I., et al., Izv. Vyssh. Uchebn. Zaved., Khim. Khim. Tekhnol., 2013, vol. 56, no. 4, p. 29.

    CAS  Google Scholar 

  5. Pivovarenok, S.A., Dunaev, A.V., and Murin, D.B., Russ. Microelectron., 2016, vol. 45, no. 5, p. 358.

    Article  Google Scholar 

  6. Dunaev, A.V., Murin, D.B., and Pivovarenok, S.A., Semiconductors, 2016, vol. 50, no. 2, p. 167.

    Article  CAS  Google Scholar 

  7. Rokhlin, G.N., Razryadnye istochniki sveta (Gas-Discharge Light Sources), 2nd ed., Moscow: Energoatomizdat, 1991.

  8. Ivanov, Yu.A., Lebedev, Yu.A., and Polak, L.K., Metody kontaktnoi diagnostiki v neravnovesnoi plazmokhimii (Contact Diagnostics Techniques in Nonequilibrium Plasma Chemistry), Moscow: Nauka, 1981.

  9. Pearse, R.W.B. and Gaydon, A.G., The Identification of Molecular Spectra, 4th ed., New York: Wiley, 1976.

    Book  Google Scholar 

  10. Striganov, A.R. and Sventitskii, N.S., Tablitsy spektral’nykh linii neitral’nykh i ionizirovannykh atomov (Tables of Spectral Lines of Neutral and Ionized Atoms), Moscow: Atomizdat, 1966.

  11. Stoffels, W.W., Stoffels, E., Haverlag, M., et al., J. Vac. Sci. Technol., A, 1995, vol. 13, no. 4, p. 2058.

    Article  CAS  Google Scholar 

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Funding

The work was carried out within the framework of the state assignment for research, topic no. FZZW-2020-0007.

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Correspondence to S. A. Pivovarenok.

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Translated by S. Zatonsky

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Pivovarenok, S.A., Bakshina, P.I. Effect of Mixture Composition on Electrophysical Parameters and Emission Spectra of Dichlorodifluoromethane Plasma with Oxygen and Helium. High Energy Chem 55, 233–237 (2021). https://doi.org/10.1134/S0018143921030097

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  • DOI: https://doi.org/10.1134/S0018143921030097

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