Abstract
Optical spectroscopy was used to study the high-energy region of the fundamental absorption edge in films of amorphous hydrogenated carbon obtained for various deposition parameters. The slope of the absorption edge was analyzed using the slope of the linear Tauc dependence. The results of the optical spectroscopy were compared with the Raman light scattering data and the content of bound hydrogen in the films. A correlation is established between the slope of the absorption edge, the deposition parameters, and the structure of the films.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
A. H. Lettington, Philos. Trans. R. Soc. London A 342, 193 (1993).
J. Robertson, Philos. Trans. R. Soc. London A 342, 277 (1993).
L. S. Aivazova, N. V. Novicov, S. I. Khandozhko et al., J. Chem. Vapor Dep. 6(1), 52 (1997).
R. O. Dillon, J. A. Woollam, and V. Karkanant, Phys. Rev. B 29, 3482 (1984).
Hisao-chu Tsai and D. B. Bogy, J. Vac. Sci. Technol. A 5, 3287 (1987).
M. A. Tamor, J. A. Haire, C. H. Wu et al., Appl. Phys. Lett. 54, 123 (1989).
B. Dischler, A. Bubenzer, and P. Koidi, Solid State Commun. 48(2), 105 (1983).
J. Tauc, R. Grigorovici, and A. Vancu, Phys. Status Solidi 15, 627 (1966).
Author information
Authors and Affiliations
Additional information
Pis’ma Zh. Tekh. Fiz. 25, 83–87 (December 26, 1999)
Rights and permissions
About this article
Cite this article
Vasin, A.V., Matveeva, L.A. & Kutsai, A.M. Analysis of the fundamental absorption edge in amorphous hydrogenated carbon films. Tech. Phys. Lett. 25, 1006–1007 (1999). https://doi.org/10.1134/1.1262714
Received:
Issue Date:
DOI: https://doi.org/10.1134/1.1262714