Fabrication Technology And Applications Of Zone Plates

Erik H. Anderson

doi:10.1117/12.962621

28 July 1989 Fabrication Technology And Applications Of Zone Plates

Erik H. Anderson

Proceedings Volume 1160, X-Ray/EUV Optics for Astronomy and Microscopy; (1989) https://doi.org/10.1117/12.962621
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

The focusing properties of zone plates have a long history spanning over a century. The fabrication technology has continually improved and has made significant advances in the last decade so that zone plates now can be fabricated with the smallest zone widths of several tens of manometers and near diffraction limited performance. For applications such as x-ray microscopy, these high resolution zone plates allow the possibility of observing biological samples in a natural, i.e. wet, environment with resolution an order of magnitude better than optical microscopy. In addition to microscopy, zone plates are critical to many x-ray applications where the focusing, imaging, and dispersive properties can be put to use. The key challenges for making better zone plates are to improve the efficiency and resolution while maintaining comfortable working distances and extend the wavelength range available. In order to meet these challenges, refinements in zone plate fabrication technology, better line placement distortion measurement/control techniques, and new processing ideas are under development.

Citation Download Citation

Erik H. Anderson "Fabrication Technology And Applications Of Zone Plates", Proc. SPIE 1160, X-Ray/EUV Optics for Astronomy and Microscopy, (28 July 1989); https://doi.org/10.1117/12.962621

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