Measuring Optically Induced Currents With The Laser Scan Microscope

Hajo Hinkelmann

doi:10.1117/12.949736

2 January 1986 Measuring Optically Induced Currents With The Laser Scan Microscope

Hajo Hinkelmann

Proceedings Volume 0565, Micron and Submicron Integrated Circuit Metrology; (1986) https://doi.org/10.1117/12.949736
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

A laser induced photoresponse method is used for visualizing electronic properties of semiconductor materials and operational ICs. There are clear advantages compared to electron beam probing. By modulation of the laser light the method can be extended to internal logic analysis.

Citation Download Citation

Hajo Hinkelmann "Measuring Optically Induced Currents With The Laser Scan Microscope", Proc. SPIE 0565, Micron and Submicron Integrated Circuit Metrology, (2 January 1986); https://doi.org/10.1117/12.949736

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