Limits Of Surface Measurement By Optical Probes

Margaret Stedman

doi:10.1117/12.949156

21 March 1989 Limits Of Surface Measurement By Optical Probes

Margaret Stedman

Proceedings Volume 1009, Surface Measurement and Characterization; (1989) https://doi.org/10.1117/12.949156
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

A wide range of non-contact optical profilometers has been described in recent years, based on a variety of principles such as interferometry, local slope measurement, and focus detection. The performances of these instruments can be compared by considering their ability to measure sinusoidal profiles, and mapping the limitations in amplitude-wavelength (AW) space. Relevant parameters depend on the design of the particular instrument. The numerical aperture of an objective lens, the maximum density of fringes that may be resolved, and the directional (angular) stability of a laser beam are examples of parameters that directly affect performance. Other relevant factors in optical, just as in stylus, instruments are the ranges and resolutions of scanning motions, and the quality of a straight datum. AW maps are presented and compared for a number of different types of optical probes and instruments, and comparisons are made with conventional stylus instruments.

Citation Download Citation

Margaret Stedman "Limits Of Surface Measurement By Optical Probes", Proc. SPIE 1009, Surface Measurement and Characterization, (21 March 1989); https://doi.org/10.1117/12.949156

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