Fabrication Of Miniature Lenses And Mirrors For InGaAsP/InP Lasers

D Yap; Z L Liau; J N Walpole; V Diadiuk

doi:10.1117/12.944556

2 June 1988 Fabrication Of Miniature Lenses And Mirrors For InGaAsP/InP Lasers

D Yap, Z L Liau, J N Walpole, V Diadiuk

Proceedings Volume 0898, Miniature Optics and Lasers; (1988) https://doi.org/10.1117/12.944556
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States

Abstract

Lenses and mirrors of micrometer scale have been fabricated in the InGaAsP/InP heterostructure material. These microoptical components include two-dimensional flat and cylindrical end-mirrors which are a part of edge-emitting laser cavities, integrated 45° beam-deflectors which direct the output beam from edge-emitting lasers to emit perpendicular to the substrate surface, and large-numerical-aperture refractive and diffractive lenses for collimating light from the diode lasers. They were fabricated by etching, using both wet-chemical and dry processes, lithographically defined patterns. In many cases a mass-transport process was also used to smooth the etched structures.

Citation Download Citation

D Yap, Z L Liau, J N Walpole, and V Diadiuk "Fabrication Of Miniature Lenses And Mirrors For InGaAsP/InP Lasers", Proc. SPIE 0898, Miniature Optics and Lasers, (2 June 1988); https://doi.org/10.1117/12.944556

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