A-S:H Films Produced From Laser Heated Gases: Process Characteristics And Film Properties

J H. Flint; M. Meunier; D Adler; J S Haggerty

doi:10.1117/12.939437

14 June 1984 A-S:H Films Produced From Laser Heated Gases: Process Characteristics And Film Properties

J H. Flint, M. Meunier, D Adler, J S Haggerty

Proceedings Volume 0459, Laser-Assisted Deposition, Etching, and Doping; (1984) https://doi.org/10.1117/12.939437
Event: 1984 Los Angeles Technical Symposium, 1984, Los Angeles, United States

Abstract

A process for depositing a-Si:H films from CO₂ laser-heated gases has been demonstrated and modelled, the properties of resulting films have been investigated extensively. Film growth rate is determined by the peak gas temperature, defined by an energy balance between the absorption of the laser beam and thermal conduction to the substrate and the cell walls. The hydrogen content and neutral spin density follow an equilibrium function of the substrate temperature. The optical and electronic properties also depend on the substrate temperature.

Citation Download Citation

J H. Flint, M. Meunier, D Adler, and J S Haggerty "A-S:H Films Produced From Laser Heated Gases: Process Characteristics And Film Properties", Proc. SPIE 0459, Laser-Assisted Deposition, Etching, and Doping, (14 June 1984); https://doi.org/10.1117/12.939437

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available