Optical testing for meter size aspheric optics

Peng Su; Chang Jin Oh; Chunyu Zhao; James H. Burge

doi:10.1117/12.930513

25 October 2012 Optical testing for meter size aspheric optics

Peng Su, Chang Jin Oh, Chunyu Zhao, James H. Burge

Proceedings Volume 8466, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI; 84660S (2012) https://doi.org/10.1117/12.930513
Event: SPIE NanoScience + Engineering, 2012, San Diego, California, United States

Abstract

Several meter size steep aspheric optics, with aspheric departure ranging from 100μm to 2mm, have been successfully fabricated at the College of Optical Sciences at University of Arizona. Optical metrology systems have been developed for measuring the optical surfaces efficiently and accurately. These systems include laser tracker surface profiler, swing arm optical CMM with different type of sensors, slope measurements with SCOTS, the Software Configurable Optical Test System (SCOTS) and interferometry with computer generated holograms. We summarize the test methods and provide comparison of the relative strengths and weaknesses.

Citation Download Citation

Peng Su, Chang Jin Oh, Chunyu Zhao, and James H. Burge "Optical testing for meter size aspheric optics", Proc. SPIE 8466, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI, 84660S (25 October 2012); https://doi.org/10.1117/12.930513

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