Preliminary results of large-actuator-count MEMS DM development

Michael A. Helmbrecht; Min He; Patrick Rhodes; Carl J. Kempf

doi:10.1117/12.845608

18 February 2010 Preliminary results of large-actuator-count MEMS DM development

Michael A. Helmbrecht, Min He, Patrick Rhodes, Carl J. Kempf

Proceedings Volume 7595, MEMS Adaptive Optics IV; 75950C (2010) https://doi.org/10.1117/12.845608
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

Compensating for atmospheric turbulence in meter-class telescopes and for free-space communications can require deformable mirrors (DM) with hundreds of actuators. Advances in high-contrast imaging techniques and increased telescope sizes require DMs mirrors with thousands of actuators [1]-[3]. In response to these needs, Iris AO has been developing a nearly 500-actuator DM and is conducting pathfinding research into 3000-actuator class DMs. This paper begins with an overview of the segmented DM design and describes improvements made to the DM over the prior year in the areas of speed, high-quality dielectric coatings, and snap-in prevention structures. The paper then describes the next-generation PTT489 DM design and fabrication process. Failure modes encountered during fabrication are presented as well as test methods to detect the failure modes. Preliminary yield data are presented for the fabrication process as well. The paper concludes with a view to the future showing pathfinding research into 3000-actuator DMs.

Citation Download Citation

Michael A. Helmbrecht, Min He, Patrick Rhodes, and Carl J. Kempf "Preliminary results of large-actuator-count MEMS DM development", Proc. SPIE 7595, MEMS Adaptive Optics IV, 75950C (18 February 2010); https://doi.org/10.1117/12.845608

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available