Research on the closed-loop system of silicon resonant micro-sensor based on FPGA

Juan Zhong; Haomin Zhou

doi:10.1117/12.806318

13 October 2008 Research on the closed-loop system of silicon resonant micro-sensor based on FPGA

Juan Zhong, Haomin Zhou

Proceedings Volume 7127, Seventh International Symposium on Instrumentation and Control Technology: Sensors and Instruments, Computer Simulation, and Artificial Intelligence; 712710 (2008) https://doi.org/10.1117/12.806318
Event: Seventh International Symposium on Instrumentation and Control Technology, 2008, Beijing, China

Abstract

This paper designs a digital closed-loop system on FPGA, aiming at silicon resonant pressure micro-sensor, which is inspirited by electricity, and picked up by resistances. This closed-loop system uses a method integrated by correlation detection and frequency scan to detect the resonance frequency of sensors, and then achieves pressure detection. Experiments have validated that this system can detect the resonance frequency of sensors effectively, overcoming the feebleness output signal and low SNR(signal noise ratio).

Citation Download Citation

Juan Zhong and Haomin Zhou "Research on the closed-loop system of silicon resonant micro-sensor based on FPGA", Proc. SPIE 7127, Seventh International Symposium on Instrumentation and Control Technology: Sensors and Instruments, Computer Simulation, and Artificial Intelligence, 712710 (13 October 2008); https://doi.org/10.1117/12.806318

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available