Fabrication studies for scaling photonic MEMS micro-shutter designs

Derrick Langley; Stanley Rogers; Lavern Starman

doi:10.1117/12.800475

19 August 2008 Fabrication studies for scaling photonic MEMS micro-shutter designs

Derrick Langley, Stanley Rogers, Lavern Starman

Proceedings Volume 7096, Adaptive Coded Aperture Imaging and Non-Imaging Sensors II; 70960G (2008) https://doi.org/10.1117/12.800475
Event: Optical Engineering + Applications, 2008, San Diego, California, United States

Abstract

This paper will investigate micro-shutter MEMS "fabrication techniques" and processes to identify opportunities and barriers for successful implementation of micro-shutter technologies to enable adaptive coded aperture imaging and nonimaging systems. The use of photonic MEMS for creating adaptive coded apertures has been gaining momentum since 2007. Both Industry-based1, 2 and University-based3 studies have demonstrated their unique solutions for implementing MEMS-based micro-shutter technologies; however, there are many unique and novel MEMS-based "fabrication and characterization" processes and solutions that will be considered herein as we explore micro-shutter technologies. This paper discusses challenges and opportunities that may arise from in-house fabrication of MEMS which may prevent and/or improve structural uniformity, reproducibility, & reliability. This paper will also discuss characterization of the micro-shutters to include mechanical, electrical and optical properties. The "open and close" speeds of the micro-shutter device will also be assessed from a scaling perspective to determine usability.

Citation Download Citation

Derrick Langley, Stanley Rogers, and Lavern Starman "Fabrication studies for scaling photonic MEMS micro-shutter designs", Proc. SPIE 7096, Adaptive Coded Aperture Imaging and Non-Imaging Sensors II, 70960G (19 August 2008); https://doi.org/10.1117/12.800475

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