Porous silicon surface feature size estimation using the reflectance spectrum

Christopher Lowrie; Susan Earles; M. de Fernandez

doi:10.1117/12.759323

13 February 2008 Porous silicon surface feature size estimation using the reflectance spectrum

Christopher Lowrie, Susan Earles, M. de Fernandez

Proceedings Volume 6898, Silicon Photonics III; 68981F (2008) https://doi.org/10.1117/12.759323
Event: Integrated Optoelectronic Devices 2008, 2008, San Jose, California, United States

Abstract

In this paper we excite the surface of porous silicon with incoherent, broad band white light and observe the spectrum of colors reflected from the surface. Using an atomic force microscope images from red and green porous silicon samples are collected. In this paper we relate the optical color of the surface to the size of scattering features on the textured surface. From image segmentation using the watershed transform the height distributions of the optical scattering features are determined. The heights of these surface features are then used as input variables to a computer simulation of a reflective grating. The computer predicted color is compared to the measured color. In this manner, by inspection of the reflected color from the textured porous silicon surface the physical size of the surface features can be estimated.

Citation Download Citation

Christopher Lowrie, Susan Earles, and M. de Fernandez "Porous silicon surface feature size estimation using the reflectance spectrum", Proc. SPIE 6898, Silicon Photonics III, 68981F (13 February 2008); https://doi.org/10.1117/12.759323

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