Suppressing vibration errors in phase-shifting interferometry

Leslie L. Deck

doi:10.1117/12.731421

27 September 2007 Suppressing vibration errors in phase-shifting interferometry

Leslie L. Deck

Proceedings Volume 6704, Advances in Metrology for X-Ray and EUV Optics II; 670402 (2007) https://doi.org/10.1117/12.731421
Event: Optical Engineering + Applications, 2007, San Diego, California, United States

Abstract

A new method for reducing the influence of vibrations in phase-shifting interferometry uses spatial information to achieve a 100X reduction in vibrationally induced surface distortion for small-amplitude vibrations. The technique does not require high density spatial carrier fringes and maintains full lateral sampling resolution. The principles of the technique are discussed and calculations highlight the capabilities, supported by real measurements under a variety of vibration conditions.

Citation Download Citation

Leslie L. Deck "Suppressing vibration errors in phase-shifting interferometry", Proc. SPIE 6704, Advances in Metrology for X-Ray and EUV Optics II, 670402 (27 September 2007); https://doi.org/10.1117/12.731421

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