Reinforcement of PDMS masters using silicon plates

Cheng Luo; Fang Meng; Yiyun Guo; Xinchuan Liu; Amitha Govindaraju

doi:10.1117/12.600324

16 May 2005 Reinforcement of PDMS masters using silicon plates

Cheng Luo, Fang Meng, Yiyun Guo, Xinchuan Liu, Amitha Govindaraju

Proceedings Volume 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; (2005) https://doi.org/10.1117/12.600324
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2005, San Diego, California, United States

Abstract

In this work, a new method was developed to increase the stiffness of PDMS (Polydimethylsiloxane) masters using Si plates, aimed at reducing residual deformations of the PDMS masters induced in the molding process. Using this method, both global and local residual deformations in the reinforced PDMS master have been reduced.

Citation Download Citation

Cheng Luo, Fang Meng, Yiyun Guo, Xinchuan Liu, and Amitha Govindaraju "Reinforcement of PDMS masters using silicon plates", Proc. SPIE 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (16 May 2005); https://doi.org/10.1117/12.600324

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