Multilayer coating method for x-ray reflectivity enhancement of polysilicon micro-mirrors at 1.54-Å wavelength

Marie K. Tripp; Francois Fabreguette; Cari F. Herrmann; Steven M. George; Victor M. Bright

doi:10.1117/12.590429

22 January 2005 Multilayer coating method for x-ray reflectivity enhancement of polysilicon micro-mirrors at 1.54-Å wavelength

Marie K. Tripp, Francois Fabreguette, Cari F. Herrmann, Steven M. George, Victor M. Bright

Author Affiliations +

Proceedings Volume 5720, Micromachining Technology for Micro-Optics and Nano-Optics III; (2005) https://doi.org/10.1117/12.590429
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

A poly-silicon piston micro-mirror array, which has been enhanced with a multilayer coating to exhibit special reflective properties at Cu K_α emission line of 1.54 Å is presented. The micro-mirror array is fabricated using the MEMSCAP PolyMUMPs process and packaged in a ceramic package. The packaged array is coated using atomic layer deposition with an Al₂O₃/W multilayer. The first Al₂O₃ layer is thicker than for a normal bilayer pair and prevents the mirror coating from creating an electrical short. This device was tested before and after coating. The snap-down voltage was reduced by half, but qualitatively the mechanical motion remained similar. The fabrication process presented for the Cu K_α wavelength at 1.54 Å can be easily adapted to other optical MEMS and for other wavelengths.

Citation Download Citation

Marie K. Tripp, Francois Fabreguette, Cari F. Herrmann, Steven M. George, and Victor M. Bright "Multilayer coating method for x-ray reflectivity enhancement of polysilicon micro-mirrors at 1.54-Å wavelength", Proc. SPIE 5720, Micromachining Technology for Micro-Optics and Nano-Optics III, (22 January 2005); https://doi.org/10.1117/12.590429

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