Atomic-force-regulated near-field scanning optical microscope

Ricardo Toledo-Crow; Yue Chen; Mehdi Vaez-Iravani

doi:10.1117/12.58192

1 May 1992 Atomic-force-regulated near-field scanning optical microscope

Ricardo Toledo-Crow, Yue Chen, Mehdi Vaez-Iravani

Proceedings Volume 1639, Scanning Probe Microscopies; (1992) https://doi.org/10.1117/12.58192
Event: OE/LASE '92, 1992, Los Angeles, CA, United States

Abstract

The design and theory of operation of a new form of near field scanning optical microscope are presented. In this system, the tip/sample distance regulation is achieved in a feedback system utilizing the topography information derived from the attractive force sensed between the tip and the sample. The technique affords the possibility of correlative microscopy. Results are presented on imaging blood smears and thin film integrated circuits.

Citation Download Citation

Ricardo Toledo-Crow, Yue Chen, and Mehdi Vaez-Iravani "Atomic-force-regulated near-field scanning optical microscope", Proc. SPIE 1639, Scanning Probe Microscopies, (1 May 1992); https://doi.org/10.1117/12.58192

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