Seeing more, looking at less: applications of IR microscopy

Peter Grosse; Lukas Kuepper; Wolfgang Theiss

doi:10.1117/12.56457

1 March 1992 Seeing more, looking at less: applications of IR microscopy

Peter Grosse, Lukas Kuepper, Wolfgang Theiss

Proceedings Volume 1575, 8th Intl Conf on Fourier Transform Spectroscopy; (1992) https://doi.org/10.1117/12.56457
Event: Eighth International Conference on Fourier Transform Spectroscopy, 1991, Lubeck-Travemunde, Germany

Abstract

Applications of IR microscopy in solid state physics are shown, namely, the investigations of layer thickness variations in semiconductor systems and of the scattering characteristics of small particles, both making use of the ability to take spectra from small sample spots.

Citation Download Citation

Peter Grosse, Lukas Kuepper, and Wolfgang Theiss "Seeing more, looking at less: applications of IR microscopy", Proc. SPIE 1575, 8th Intl Conf on Fourier Transform Spectroscopy, (1 March 1992); https://doi.org/10.1117/12.56457

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