Method of parameterization of exact electron trajectory equations

S. B. Birmurzayez; E. M. Yakushev

doi:10.1117/12.551801

1 March 2004 Method of parameterization of exact electron trajectory equations

S. B. Birmurzayez, E. M. Yakushev

Proceedings Volume 5398, Sixth Seminar on Problems of Theoretical and Applied Electron and Ion Optics; (2004) https://doi.org/10.1117/12.551801
Event: Sixth Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 2003, Moscow, Russian Federation

Abstract

A method of parameterization of electron trajectory equations, which enables to obtain an exact solution to the equation as a sum of solutions to paraxial equation and residue equations, is presented. The residue equations are derived without usage of a common method of expansion in terms of powers of small values. Paraxial equation and residue equations are reduced to the form that does not contain peculiarities typical of mirror and emission systems. The method developed in this paper can be successfully applied to precise, unlimited by a given order of smallness of magnitude, calculation of basic types of aberrations - spherical and axial chromatic aberrations.

Citation Download Citation

S. B. Birmurzayez and E. M. Yakushev "Method of parameterization of exact electron trajectory equations", Proc. SPIE 5398, Sixth Seminar on Problems of Theoretical and Applied Electron and Ion Optics, (1 March 2004); https://doi.org/10.1117/12.551801

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