Hydrostatic actuation in MEMS

Simon Mutzenich; Thurai Vinay; Gary Rosengarten

doi:10.1117/12.476130

14 November 2002 Hydrostatic actuation in MEMS

Simon Mutzenich, Thurai Vinay, Gary Rosengarten

Proceedings Volume 4935, Smart Structures, Devices, and Systems; (2002) https://doi.org/10.1117/12.476130
Event: SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems, 2002, Melbourne, Australia

Abstract

Hydrostatic actuation is a novel method of actuation in Micro Electro Mechanical Systems (MEMS) and provides advantages over other actuation techniques in current use. Hydrostatic actuation utilises a contained pressurised medium to straighten a bent hollow beam, similar to the Bourdon tube used to measure pressure in the macro world. Research has commenced at RMIT University to design and fabricate a microgripper prototype to validate this work. To simplify the design of this microgripper a virtual prototype has been initiated. This paper looks at the work carried out and verification of this virtual prototype using mathematical and finite element modelling. Further work to be undertaken will also be discussed.

Citation Download Citation

Simon Mutzenich, Thurai Vinay, and Gary Rosengarten "Hydrostatic actuation in MEMS", Proc. SPIE 4935, Smart Structures, Devices, and Systems, (14 November 2002); https://doi.org/10.1117/12.476130

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