Three-dimensional interferometric and fiber-optic displacement measuring probe

Dawei Liang; Luis Fraser Monteiro; Boyin Lu

doi:10.1117/12.45989

1 August 1991 Three-dimensional interferometric and fiber-optic displacement measuring probe

Dawei Liang, Luis Fraser Monteiro, Boyin Lu

Proceedings Volume 1511, Fiber Optic Sensors: Engineering and Applications; (1991) https://doi.org/10.1117/12.45989
Event: ECO4 (The Hague '91), 1991, The Hague, Netherlands

Abstract

A novel three-dimensional interferometric and fiber-optic displacement measuring probe is described. As an important sensing part of a coordinate measuring machine, this compact measuring probe is successfully used in coordinate and surface scanning measurements of several types of complicated workpieces in precision engineering metrology. It is also applicable to three-dimensional vibration measurement. The distinguishing feature of this probe resides in its higher measurement accuracy on a relatively large measuring range, as compared with other conventional electric 3-D measuring probes commonly used in coordinate measuring machines. +/- 0.2 micrometers accuracy is achieved in a +/- 100 micrometers range in any spatial direction. The measuring force is less than 0.33N. This probe is very suitable for continuous surface scanning measurement. This three-dimensional interferometric and fiber-optic measuring probe consists mainly of three parts. The resilient mechanical part provides a universal movement for the measuring tip. The interferometric and fiber-optic small displacement sensing part measures this universal movement in the X, Y, and Z directions simultaneously and precisely. The opto-electronic signal detecting and processing part gives a real-time digital display of the measuring tip spatial displacement.

Citation Download Citation

Dawei Liang, Luis Fraser Monteiro, and Boyin Lu "Three-dimensional interferometric and fiber-optic displacement measuring probe", Proc. SPIE 1511, Fiber Optic Sensors: Engineering and Applications, (1 August 1991); https://doi.org/10.1117/12.45989

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