Integrated optics sensor on silicon for the measurement of displacement, force, and refractive index

Gerd Ulbers

doi:10.1117/12.45963

1 August 1991 Integrated optics sensor on silicon for the measurement of displacement, force, and refractive index

Gerd Ulbers

Proceedings Volume 1506, Micro-Optics II; (1991) https://doi.org/10.1117/12.45963
Event: ECO4 (The Hague '91), 1991, The Hague, Netherlands

Abstract

For high-precision dimensional measurement, the use of an optical interferometer is often a suitable method. A Michelson interferometer is interesting because of its simple construction. However, to detect the direction of a movement the interferometer has to be modified. Two solutions are possible: first, a double Michelson interferometer made using integrated optics technology on silicon is presented; second, a homodyne modulation and demodulation technique for a single Michelson interferometer on silicon is presented. An analysis of the performance of the both solutions is described. The interferometer developed is very small and low in price compared to the present technology. Many applications of this interferometer are possible; the measurement of displacement, force, and refractive index are presented as examples.

Citation Download Citation

Gerd Ulbers "Integrated optics sensor on silicon for the measurement of displacement, force, and refractive index", Proc. SPIE 1506, Micro-Optics II, (1 August 1991); https://doi.org/10.1117/12.45963

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