Silicon-based integrated optical pressure sensor using intermodal interference between TM-like and TE-like modes

Yuki Shirai; Takeshi Goto; Masashi Ohkawa; Seishi Sekine; Takashi Sato

doi:10.1117/12.426824

15 May 2001 Silicon-based integrated optical pressure sensor using intermodal interference between TM-like and TE-like modes

Yuki Shirai, Takeshi Goto, Masashi Ohkawa, Seishi Sekine, Takashi Sato

Author Affiliations +

Proceedings Volume 4277, Integrated Optics Devices V; (2001) https://doi.org/10.1117/12.426824
Event: Symposium on Integrated Optics, 2001, San Jose, CA, United States

Abstract

A silicon-based integrated optical pressure sensor using an intermodal interference between the fundamental TM-like and TE-like modes is described. The sensor consists of a micromachiend rectangular diaphragm and a straight polystyrene optical waveguide passing across the diaphragm. The use of the intermodal interference has the potential advantage of shortening the sensor length since it needs neither a Y-branch nor a 3-dB coupler. In the presence of the pressure difference on the diaphragm, the phase difference is yielded between the two guided modes by an anisotropic index change induced by the elasto-optic effect. The phase difference is finally transformed into a change in light intensity by an analyzing polarizer. We fabricated a sensor with a 1.2 mm by 10 mm by 20 micrometers diaphragm over which the waveguides were formed at 50 micrometers intervals. In the experiment, a linearly-polarized He-Ne laser beam at 633 nm was coupled to the two guided modes at equal intensity. The output intensity through a polarizer was sinusoidally changed at a period of 64 kPa, corresponding to a phase sensitivity of 98 mrad/lPa, for the waveguide nearest to the diaphragm edge. The measurement was carried out for other waveguide positions. The largest sensitivity was obtained for the waveguide nearest to the diaphragm edge as theoretically expected.

Citation Download Citation

Yuki Shirai, Takeshi Goto, Masashi Ohkawa, Seishi Sekine, and Takashi Sato "Silicon-based integrated optical pressure sensor using intermodal interference between TM-like and TE-like modes", Proc. SPIE 4277, Integrated Optics Devices V, (15 May 2001); https://doi.org/10.1117/12.426824

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