Surface profilometry of a thick liquid lens on a solid surface using a high-numerical-aperture phase-shifting laser feedback interferometer

David G. Fischer; Ben Ovryn

doi:10.1117/12.369214

11 November 1999 Surface profilometry of a thick liquid lens on a solid surface using a high-numerical-aperture phase-shifting laser feedback interferometer

David G. Fischer, Ben Ovryn

Author Affiliations +

Proceedings Volume 3782, Optical Manufacturing and Testing III; (1999) https://doi.org/10.1117/12.369214
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

We have developed a model that predicts the effective optical path length (OPL) through a thick, refractive specimen on a reflective substrate as measured with a high numerical aperture, confocal interference microscope. Assuming an infinitesimal pinhole, only one 'magic ray' contributes to the measured OPL. It is possible to correct for the refractive errors and to unambiguously interpret the data. We present a comparison of our model predictions with experimental measurements of a fluid drop on a silicon substrate, obtained with a phase shifting laser feedback microscope.

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David G. Fischer and Ben Ovryn "Surface profilometry of a thick liquid lens on a solid surface using a high-numerical-aperture phase-shifting laser feedback interferometer", Proc. SPIE 3782, Optical Manufacturing and Testing III, (11 November 1999); https://doi.org/10.1117/12.369214

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