Characteristics of excitation discharge of an excimer laser in gas density depletion

Go Imada; Wataru Masuda; Kiyoshi Yatsui

doi:10.1117/12.334506

22 December 1998 Characteristics of excitation discharge of an excimer laser in gas density depletion

Go Imada, Wataru Masuda, Kiyoshi Yatsui

Proceedings Volume 3574, XII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference; (1998) https://doi.org/10.1117/12.334506
Event: Twelfth International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, 1998, St. Petersburg, Russian Federation

Abstract

The influences of gas density depletion on the highly- repetitive, high-pressure, pulsed glow discharge for excitation of excimer laser have been investigated eliminating the other instabilities, such as shock waves, residual ions, discharge products and electrode heating. The gas density depletion is simulated by utilizing a subsonic flow between the curved electrodes. The comparison has been made on the discharge occurred in the presence of the gas density depletion with the second discharge on the double-pulse experiment. We have found that the big gas density non uniformity, (Delta) (rho) /(rho) ₀ approximately 3.6% corresponding to a pulse repetition rate (PRR) of approximately 20 Hz, tends to cause the arc discharge without the shocks, ions, discharge products and electrode heating. On the other hand, the second discharge on the double-pulse experiment becomes arc discharge in much smaller non uniformity ((Delta) (rho) /(rho) ₀ approximately 1.2% corresponding to PRR approximately 3 Hz). The arc discharge in the double-pulse experiment might be driven by the residual ions and/or discharge products other than gas density depletion except for PRR greater than 20 Hz.

Citation Download Citation

Go Imada, Wataru Masuda, and Kiyoshi Yatsui "Characteristics of excitation discharge of an excimer laser in gas density depletion", Proc. SPIE 3574, XII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, (22 December 1998); https://doi.org/10.1117/12.334506

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