Measurement devices with and for micro-optics at the University of Erlangen

Norbert Lindlein; Johannes Schwider

doi:10.1117/12.323352

29 September 1998 Measurement devices with and for micro-optics at the University of Erlangen

Norbert Lindlein, Johannes Schwider

Proceedings Volume 3407, International Conference on Applied Optical Metrology; (1998) https://doi.org/10.1117/12.323352
Event: International Conference on Applied Optical Metrology, 1998, Balatonfured, Hungary

Abstract

Several devices for the measurement of micro-optical elements will be presented. These are a Mach-Zehnder interference microscope for the measurement of the wave aberrations of microlenses in transmission using a HeNe laser (633 nm wavelength) and a shearing interferometer for the measurement of microlenses in transmission in the near infrared (1319 nm). This shearing interferometer uses two Ronchi gratings to provide a lateral shear and is therefore very compact and stable. We also describe a Twyman-Green interference microscope for the measurement of (nearly) spherical surfaces in reflection using partially coherent illumination. Microlenses can be also used to build measurement devices from micro- and macro-optics. We will present a Shack-Hartmann wavefront sensor with microlenses for the measurement of quite arbitrary wavefronts and a confocal set-up which uses an array of microlenses and stops to provide a confocal measurement without a lateral scanning of the object. This confocal set-up can be used to measure the surface profile of micro-optical structures like gratings or microlenses.

Citation Download Citation

Norbert Lindlein and Johannes Schwider "Measurement devices with and for micro-optics at the University of Erlangen", Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); https://doi.org/10.1117/12.323352

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