IC microtransducers: new components with old materials?

Henry Baltes; Dirk Lange; Andreas Koll

doi:10.1117/12.284502

5 September 1997 IC microtransducers: new components with old materials?

Henry Baltes, Dirk Lange, Andreas Koll

Proceedings Volume 3224, Micromachined Devices and Components III; (1997) https://doi.org/10.1117/12.284502
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States

Abstract

In the first part of this paper, we review the integration of MEMS and CMOS microtransducer technology and out-line the related IC MEMS CAD tools SOLIDIS and ICMAT. The IC microtransducer approach is illustrated by deflectable micromirrors, infrared sensors, and a thermally isolated n- well CMOS device. In the second part, we report two novel chemical microsensors based on CMOS MEMS technology: (i) a piezoresistive resonating beam with hydrocarbon-sensitive polymer layer and (ii) a microsystem chip including a piezoresistive and capacitive chemical sensors with co- integrated heating deice and circuitry.

Citation Download Citation

Henry Baltes, Dirk Lange, and Andreas Koll "IC microtransducers: new components with old materials?", Proc. SPIE 3224, Micromachined Devices and Components III, (5 September 1997); https://doi.org/10.1117/12.284502

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