Measuring angle-resolved dynamic deformation of micromirrors with digital stroboscopic holography

Pooja Thakkar; Clément Fleury; Markus Bainschab; Takashi Sasaki; Markus Zauner; Dominik Holzmann; Adrien Piot; Jaka Pribošek

doi:10.1117/12.2621325

20 May 2022 Measuring angle-resolved dynamic deformation of micromirrors with digital stroboscopic holography

Pooja Thakkar, Clément Fleury, Markus Bainschab, Takashi Sasaki, Markus Zauner, Dominik Holzmann, Adrien Piot, Jaka Pribošek

Author Affiliations +

Proceedings Volume 12137, Optics and Photonics for Advanced Dimensional Metrology II; 121370H (2022) https://doi.org/10.1117/12.2621325
Event: SPIE Photonics Europe, 2022, Strasbourg, France

Abstract

.We report the use of digital holographic microscopy to study harmonic evolution of dynamic deformation of two orthogonal modes of resonating piezoelectric MEMS mirror with a gimbal frame suspension. For the bending mode, the results show a linear relationship between dynamic deformation and the optical scan angle. For the torsional mode, a hysteretic behavior is observed, showing a significant difference depending on the scan direction. The difference was measured to be 45 nm, representing 18% of the total dynamic deformation of this mode. To investigate this effect, a point-by-point Fourier expansion method of the deformation cycle was employed and mechanical harmonics were extracted. From studying the first harmonic, we conclude that the origin of the hysteresis can be attributed to the phase difference in the oscillation of the two extrema points at the edge of the mirror, defining the peak-to-value deformation. In addition, higher-order harmonic terms (3rd and 5th) were identified and are affecting the hysteresis shape. Next, a modulation transfer function, corresponding to the measured angle-resolved dynamic deformation was estimated. Results show small contrast loss originating from the torsional mode, with an almost negligible effect of the hysteresis. The loss of contrast is dominated by the dynamic deformation of bending mode and was estimated to be 96% already at 0.18 normalized spatial frequency.

Conference Presentation

Citation Download Citation

Pooja Thakkar, Clément Fleury, Markus Bainschab, Takashi Sasaki, Markus Zauner, Dominik Holzmann, Adrien Piot, and Jaka Pribošek "Measuring angle-resolved dynamic deformation of micromirrors with digital stroboscopic holography", Proc. SPIE 12137, Optics and Photonics for Advanced Dimensional Metrology II, 121370H (20 May 2022); https://doi.org/10.1117/12.2621325

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