CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume 11112 > Article
Paper
9 September 2019 Mechanical design of a flexural nanopositioning stage system for hard x-ray nanofocusing at the Advanced Photon Source 32-ID-C station
Deming Shu, Vincent De Andrade, Jayson Anton, Steven Kearney, Kamel Fezzaa, Sunil Bean, Alex Deriy, Wenjun Liu, Jorg Maser, Barry Lai, Jonathan Z. Tischler, Francesco De Carlo
Author Affiliations +
Proceedings Volume 11112, X-Ray Nanoimaging: Instruments and Methods IV; 111120N (2019) https://doi.org/10.1117/12.2529384
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States
Abstract
The Transmission X-ray Microscope (TXM) at beamline 32-ID-C of the Advanced Photon Source (APS) is a high throughput instrument with high spatial resolution for operando nano-tomography experiments [1]. Recently, a flexural nanopositioning stage system has been designed, and constructed at the APS for a set of JTECTM Kirkpatrick-Baez (KB) mirrors to be installed at the beamline 32-ID-C station. It will focus X-ray down to a 15-20 nm focal spot that will serve as a point source for projection microscopy. Many flexural stages in the stage system are using the same designs developed by APS for the beamline 34-ID-E [2]. However, the new stage system configuration is optimized for the operation conditions at the APS 32-ID-C to accommodate large nano-tomography sample stages. The experiences gained from this new flexural nanopositioning stage system design will benefit designs of K-B mirror nanofocusing stages for other x-ray nanoprobe beamline instruments at the APS-Upgrade project, especially for the In-Situ Nanoprobe instrument design. The mechanical design of the flexural stages, as well as its preliminary mechanical test results with laser interferometer are described in this paper.
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Deming Shu, Vincent De Andrade, Jayson Anton, Steven Kearney, Kamel Fezzaa, Sunil Bean, Alex Deriy, Wenjun Liu, Jorg Maser, Barry Lai, Jonathan Z. Tischler, and Francesco De Carlo "Mechanical design of a flexural nanopositioning stage system for hard x-ray nanofocusing at the Advanced Photon Source 32-ID-C station", Proc. SPIE 11112, X-Ray Nanoimaging: Instruments and Methods IV, 111120N (9 September 2019); https://doi.org/10.1117/12.2529384
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 9 PAGES
DOWNLOAD PAPER SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Hard x-rays
Mechanical engineering
Mirrors
X-rays
Nanoprobes
Finite element methods
Microscopes
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top