Improving within-run uniformity of polysilicon film

Judith B. Barker

doi:10.1117/12.250905

13 September 1996 Improving within-run uniformity of polysilicon film

Judith B. Barker

Proceedings Volume 2876, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II; (1996) https://doi.org/10.1117/12.250905
Event: Microelectronic Manufacturing 1996, 1996, Austin, TX, United States

Abstract

SVG/Thermco 7000 series VTRs (vertical thermal reactors) were purchased capable of running 100 production wafers in a single run. Manufacturing needs required an increase to 125 production wafers per run. Polysilicon deposition furnaces with five zone temperature control were capable of running 125 production wafers, but furnaces with three zone temperature control were not. The three zone temperature controlled furnace showed an elevated thickness signature near the top test wafer position. This increased thickness measured near upper specification limits. A designed experiment was run based on dummy wafer placement and end zone temperature setpoints. The optimized dummy wafer load and top and bottom temperature setpoints improved the wafer within-run uniformity from 8.0% to 1.8%.

Citation Download Citation

Judith B. Barker "Improving within-run uniformity of polysilicon film", Proc. SPIE 2876, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (13 September 1996); https://doi.org/10.1117/12.250905

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available