Paper
6 February 2019 Integration of functional microstructures inside a microfluidic chip by direct femtosecond laser writing
Zhijiang Hu, Liang Yang, Bing Xu, Chenchu Zhang, Hongmei Zhong, Chen Xin, Kai Hu, Hao Wu, Yanlei Hu, Dong Wu
Author Affiliations +
Abstract
In the development of microfluidic systems, conventional 2D processing technologies are increasingly difficult to meet the requirement of integration of multifunctional components within a microchannel. Recently, two-photon polymerization (TPP) technology has emerged as a novel alternative to fabricate 3D microdevices functionalizing conventional microfluidic chips. Here, the development of TPP microfluidic technology comprising parallel fabrication, holographic patterning method and real-time lithography in a controlled flow is reported. And a series of functional microcomponents containing microfilters, microsorters, microtrap, tunable microlens are fabricated by above methods. The results indicate that the processing of microfluidic devices is simple, timesaving, low cost and programmable designability. The functional microchips are further used in blood cells sorting, biomedical sensing, microparticle purification and trapping with successful test results.
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Zhijiang Hu, Liang Yang, Bing Xu, Chenchu Zhang, Hongmei Zhong, Chen Xin, Kai Hu, Hao Wu, Yanlei Hu, and Dong Wu "Integration of functional microstructures inside a microfluidic chip by direct femtosecond laser writing", Proc. SPIE 10842, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subdiffraction-limited Plasmonic Lithography and Innovative Manufacturing Technology, 108420J (6 February 2019); https://doi.org/10.1117/12.2506742
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KEYWORDS
Particles

Microfluidics

Microlens

Femtosecond phenomena

Magnetism

Lab on a chip

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