PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
By methods of hard X-ray diffraction (λ=0.154 nm) and scanning electron microscopy the surface morphology of Sc/Si multilayer mirrors influenced with nanosecond pulses of discharge capillary laser (λ=46.9 nm) is studied. Under irradiation a relief of periodically alternating valleys and ridges is formed. The region of observed relief is extended over the space being ~104 greater than the irradiated region. Periodic relief (periodicity of 2.2-2.3 μm) appears as a result of reaction between Sc and Si layers making valleys (Sc3Si5 silicide) and ridges (ScSi monosilicide). Each of periods has complex structure exactly repeated in neighbor periods. Mechanisms of periodic relief formation are discussed.
Y. P. Pershyn,A. Zolotaryov,J. J. Rocca,A. Y. Devizenko,V. V. Kondratenko,I. A. Artyukov, andA. V. Vinogradov
"Formation of periodic relief at Sc/Si multilayer surface under EUV laser irradiation", Proc. SPIE 10236, Damage to VUV, EUV, and X-ray Optics VI, 102360J (15 May 2017); https://doi.org/10.1117/12.2267292
ACCESS THE FULL ARTICLE
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
The alert did not successfully save. Please try again later.
Y. P. Pershyn, A. Zolotaryov, J. J. Rocca, A. Y. Devizenko, V. V. Kondratenko, I. A. Artyukov, A. V. Vinogradov, "Formation of periodic relief at Sc/Si multilayer surface under EUV laser irradiation," Proc. SPIE 10236, Damage to VUV, EUV, and X-ray Optics VI, 102360J (15 May 2017); https://doi.org/10.1117/12.2267292