Optimization of LOPA-based direct laser writing technique for fabrication of submicrometric polymer two- and three-dimensional structures

Mai Trang Do; Qinggele Li; Isabelle Ledoux-Rak; Ngoc Diep Lai

doi:10.1117/12.2051910

2 May 2014 Optimization of LOPA-based direct laser writing technique for fabrication of submicrometric polymer two- and three-dimensional structures

Mai Trang Do, Qinggele Li, Isabelle Ledoux-Rak, Ngoc Diep Lai

Author Affiliations +

Proceedings Volume 9127, Photonic Crystal Materials and Devices XI; 912703 (2014) https://doi.org/10.1117/12.2051910
Event: SPIE Photonics Europe, 2014, Brussels, Belgium

Abstract

We demonstrate a novel and very simple method allowing very easy flexible fabrication of 2D and 3D submicrometric structures. By using a photosensitive polymer (SU8) possessing an ultralow one-photon absorption (LOPA) coefficient at the excition laser wavelength (532 nm) and a high numerical aperture (NA = 1.3, oil immersion) objective lens, various submicrometric structures with feature size as small as 150 nm have been successfully fabricated. We have further investigated the energy accumulation effect in LOPA direct laser writing when the structure lattice constant approaches the diffraction limit. In this case, a proximity correction, i.e., a compensation of the doses between different voxels, was applied, allowing to create uniform and submicrometric structures with a lattice constant as small as 400 nm. As compared to commonly used two-photon absorption microscopy, the LOPA method allows to simplify the experimental setup and also to minimize the photo-damaging or bleaching effect. The idea of using LOPA also opens a new and inexpensive way to optically address 3D structures, namely 3D fluorescence imaging and 3D data storage.

Citation Download Citation

Mai Trang Do, Qinggele Li, Isabelle Ledoux-Rak, and Ngoc Diep Lai "Optimization of LOPA-based direct laser writing technique for fabrication of submicrometric polymer two- and three-dimensional structures", Proc. SPIE 9127, Photonic Crystal Materials and Devices XI, 912703 (2 May 2014); https://doi.org/10.1117/12.2051910

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available