Interface and volume inhomegeneities in optical thin films investigated by light scattering methods

Angela Duparre; Stefan Gliech; Karl Hehl; Stephan Pichlmaier; Uwe Schuhmann

doi:10.1117/12.192050

4 November 1994 Interface and volume inhomegeneities in optical thin films investigated by light scattering methods

Angela Duparre, Stefan Gliech, Karl Hehl, Stephan Pichlmaier, Uwe Schuhmann

Proceedings Volume 2253, Optical Interference Coatings; (1994) https://doi.org/10.1117/12.192050
Event: 1994 International Symposium on Optical Interference Coatings, 1994, Grenoble, France

Abstract

A theoretical formalism and experimental methods are presented, which enable statistical fluctuations of the films bulk and interface roughness properties to be estimated from volume scattering and roughness scattering, respectively. The theoretical model is implemented in a numerical algorithm that allows one to optimize experimental strategies and to determine morphological parameters from measured scattering curves. Angle resolved scattering (ARS) measurements are performed on MgF₂ films on glass substrates while varying the illumination and observation parameters. Atomic force microscopy (AFM) provides helpful additional information on the surface morphology.

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Angela Duparre, Stefan Gliech, Karl Hehl, Stephan Pichlmaier, and Uwe Schuhmann "Interface and volume inhomegeneities in optical thin films investigated by light scattering methods", Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); https://doi.org/10.1117/12.192050

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