Research on application of pulse-periodical TEA CO2 laser for processing of fragile dielectric materials with low heat conductivity

U. A. Baloshin; Igor V. Belyakov; Gennadiy M. Chernyakov; V. A. Zakirov; Igor V. Pavlishin

doi:10.1117/12.171664

1 April 1994 Research on application of pulse-periodical TEA CO2 laser for processing of fragile dielectric materials with low heat conductivity

U. A. Baloshin, Igor V. Belyakov, Gennadiy M. Chernyakov, V. A. Zakirov, Igor V. Pavlishin

Author Affiliations +

Proceedings Volume 2257, Russia National Conference: Industrial Lasers and Laser Material Processing; (1994) https://doi.org/10.1117/12.171664
Event: Industrial Lasers and Laser Material Processing: Russian National Conference, 1993, Shatura, Moscow Region, Russian Federation

Abstract

Some peculiarities of interaction between laser radiation and dielectric matter are discussed in this paper from the point of view of their technological applications. As has been shown, laser technologies of processing of dielectric materials with low heat conduction have essential advantage. Among them the impulse-periodical TEA CO₂ laser technology excels in the quality of processing. The original experimental plant is described in the paper. The results of comparison of quality of processing of different dielectric plates by ultrasound and pulse- periodical laser technologies are presented.

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U. A. Baloshin, Igor V. Belyakov, Gennadiy M. Chernyakov, V. A. Zakirov, and Igor V. Pavlishin "Research on application of pulse-periodical TEA CO2 laser for processing of fragile dielectric materials with low heat conductivity", Proc. SPIE 2257, Russia National Conference: Industrial Lasers and Laser Material Processing, (1 April 1994); https://doi.org/10.1117/12.171664

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