Development of piezoelectric adaptive mirror for hard x-ray nanofocusing

S. Matsuyama; T. Kimura; H. Nakamori; S. Imai; Y. Sano; Y. Kohmura; K. Tamasaku; M. Yabashi; T. Ishikawa; K. Yamauchi

doi:10.1117/12.930276

15 October 2012 Development of piezoelectric adaptive mirror for hard x-ray nanofocusing

S. Matsuyama, T. Kimura, H. Nakamori, S. Imai, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 8503, Adaptive X-Ray Optics II; 850303 (2012) https://doi.org/10.1117/12.930276
Event: SPIE Optical Engineering + Applications, 2012, San Diego, California, United States

Abstract

To construct an adaptive X-ray focusing optical system, we developed an ultraprecise deformable mirror that consists of a substrate, piezoelectric actuators, and 18 electrodes. A one-dimensional focusing test was performed at SPring-8 at 15 keV. The mirror deformation was roughly adjusted by applying voltages determined by a deformation test with a Fizeau interferometer. The shape was then finely corrected based on the shape determined by the pencil-beam method and the phase retrieval method. A focused beam with a full width at half maximum of 120 nm was obtained.

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S. Matsuyama, T. Kimura, H. Nakamori, S. Imai, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi "Development of piezoelectric adaptive mirror for hard x-ray nanofocusing", Proc. SPIE 8503, Adaptive X-Ray Optics II, 850303 (15 October 2012); https://doi.org/10.1117/12.930276

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