A method for measuring acid generation efficiency is presented and utilized to determine the relative efficiency of four photoacid generators (PAGs) upon radiation with photon, electron, and ion beams. In this method, chemically amplified resists are prepared with varying amounts of base, coated into thin films (1000 Å), and exposed. Linear plots of the base concentration against the threshold exposure dose for each resist yield the threshold acid concentration and the acid generation rate constant for each PAG. The acid-generating efficiency of the four PAGs (ND-Tf, TPS-Tf, TBI-PFOS, and TBI-Tf) upon irradiation with DUV (248 nm), EUV (13.4 nm), x-ray (1 nm), e beam (30 and 50 keV), and He+ ions is evaluated.

Topics
X-rays, Thin films, Reaction rate constants
1.
D. C.
Joy
,
Inst. Phys. Conf. Ser.
67
,
445
(
1983
).
Google Scholar
 
2.
Y. M.
Ham
,
K. H.
Baik
,
W. G.
Lee
,
T. D.
Chung
, and
K.
Chun
,
Jpn. J. Appl. Phys., Part 1
37
,
6761
(
1998
).
Google Scholar
Crossref
Search ADS
 
3.
G. H.
Jansen
,
J. Appl. Phys.
84
,
4549
(
1998
).
Google Scholar
Crossref
Search ADS
 
4.
K.
Vutova
and
G.
Mladenov
,
Thin Solid Films
214
,
144
(
1992
).
Google Scholar
Crossref
Search ADS
 
5.
K.
Vutova
and
G.
Mladenov
,
Thin Solid Films
200
,
353
(
1991
).
Google Scholar
Crossref
Search ADS
 
6.
Y.
Chen
,
C.
Vieu
, and
H.
Launois
,
Condens. Matter News
6
,
22
(
1998
).
Google Scholar
 
7.
L. E.
Ocola
,
D.
Fryer
,
P.
Nealey
,
J.
DePablo
,
F.
Cerrina
, and
S.
Kammer
,
J. Vac. Sci. Technol. B
14
,
3974
(
1996
).
Google Scholar
Crossref
Search ADS
 
8.
W. H.
Bruenger
,
H.
Buschbeck
,
E.
Cekan
,
S.
Eder
,
T. H.
Fedynyshyn
,
W. G.
Hertlein
,
P.
Hudek
,
I.
Kostic
,
H.
Loeschner
,
I. W.
Rangelow
, and
M.
Torkler
,
Microelectron. Eng.
41/42
,
237
(
1998
).
Google Scholar
Crossref
Search ADS
 
9.
N.
Rau
,
A.
Neureuther
,
T.
Ogawa
,
R.
Kubena
,
F.
Stratton
,
C.
Fields
, and
G.
Willson
,
Proc. SPIE
3333
,
1413
(
1998
).
Google Scholar
Crossref
Search ADS
 
10.
F. H.
Dill
,
W. P.
Hornberger
,
P. S.
Hauge
, and
J. M.
Shaw
,
IEEE Trans. Electron Devices
ED22
,
445
(
1975
).
Google Scholar
 
11.
J.
Thackeray
,
M.
Denison
,
T.
Fedynyshyn
,
D.
Kang
, and
R.
Sinta
,
ACS Symp. Ser.
614
,
110
(
1995
).
Google Scholar
Crossref
Search ADS
 
12.
J. Cameron, D. Kang, M. King, M. Mori, S. Virdee, T. Zydowsky, and R. Sinta, Proceedings of the SPE 11th International Conference on Photopolymers, 6–8 October 1997, Great Gorge, NJ, p. 20.
13.
A. R.
Eckert
and
W. M.
Moreau
,
Proc. SPIE
3049
,
879
(
1997
).
Google Scholar
Crossref
Search ADS
 
14.
U.
Okoroanyanwu
,
J. D.
Byers
,
T.
Cao
,
S. E.
Webber
, and
C. G.
Willson
,
Proc. SPIE
3333
,
747
(
1998
).
Google Scholar
Crossref
Search ADS
 
15.
G.
Pohlers
,
J. C.
Scaiano
, and
R.
Sinta
,
Celest. Mech. Dyn. Astron.
9
,
3222
(
1997
).
Google Scholar
 
16.
C. R.
Szmanda
,
R.
Kavanagh
,
J.
Bohland
,
J.
Cameron
,
P.
Trefonas
, and
R.
Blacksmith
,
Proc. SPIE
3678
,
857
(
1999
).
Google Scholar
Crossref
Search ADS
 
17.
See, for example, H. H. Willard, L. L. Merritt, Jr. and J. A. Dean, Instrumental Methods of Analysis, 4th ed. (Van Nostrand, Princeton, 1965), pp. 342–344.
18.
Base quenchers are used commonly in chemically amplified resists. For example, see
E.
 
Shiobara
,
D.
 
Kawamura
,
K.
 
Matsunaga
,
T.
 
Koike
,
S.
 
Mimotogi
,
T.
 
Azuma
, and
Y.
 
Onishi
,
Proc. SPIE
 
3333
,
313
(
1998
);
Google Scholar
Crossref
Search ADS
 
T.
Itani
,
H.
Yoshino
,
S.
Hashimoto
,
M.
Yamana
,
N.
Samoto
, and
K.
Kasama
,
ACS Symp. Ser.
706
,
110
(
1998
).
Google Scholar
Crossref
Search ADS
 
19.
In Eq. (3) the absorbance or dose attenuation coefficient a is in base e units. Chemists frequently quote absorbance in base 10 units.
20.
B. L.
Henke
,
E. M.
Gullikson
, and
J. C.
Davis
,
At. Data Nucl. Data Tables
54
,
181
(
1993
); accessed via a JAVASCRIPT program by E. Gullikson at http://www-cxro.lbl.gov/optical_constants/
Google Scholar
Crossref
Search ADS
 
21.
See, Electron-Beam Technology in Microelectronic Fabrication, edited by G. R. Brewer (Academic, New York, 1980), pp. 67–79.
22.
M. Takahashi and S. Takechi, Jpn. Kokai Tokkyo Koho, JP10078658 A2 980324.
23.
W. R. Brunsvold, C. Knors, R. W. Kwong, M. Ling, S. Steve, M. W. Montgomery, W. M. Moreau, and H. S. Sachdev, European Patent Application No. EP 388343 A2 900919.
24.
R. D. Allen, W. R. Brunsvold, B. J. Carpenter, W. D. Hinsberg, J. Latorre, M. G. Mcmaster, M. W. Montgomery, W. M. Moreau, and L. L. Simpson, U.S., 7 pp. Cont.-in-part of U.S. Ser. No. 322,848, abandoned, U.S. 5272042 A 931221.
25.
H.
Ito
,
G.
Breyta
,
W.
Conley
,
P.
Hagerty
,
J.
Thackeray
,
S.
Holmes
,
R.
Nunes
,
D.
Fenzel-Alexander
,
R.
Dipietro
, and
D.
Hofer
,
J. Photopolym. Sci. Technol.
9
,
557
(
1996
).
Google Scholar
Crossref
Search ADS
 
26.
M. Yamachika, T. Oota, and A. Tsuji, Jpn. Kokai Tokkyo Koho, JP 08101506 A2 960416.
27.
U. Fumiyoshi, N. Takaaki, A. Katsuyama, and M. Endo, European Patent Application No. EP 704762 A1 19960403.
28.
R. D.
Allen
,
J.
Opitz
,
C. E.
Larson
,
T. I.
Wallow
,
R. A.
DiPietro
,
G.
Breyta
,
R.
Sooriyakumaran
, and
D. C.
Hofer
,
ACS Symp. Ser.
706
,
224
(
1998
).
Google Scholar
Crossref
Search ADS
 
29.
R. D.
Allen
,
J.
Opitz
,
C. E.
Larson
,
R. A.
DiPietro
,
G.
Breyta
, and
D. C.
Hofer
,
Proc. SPIE
3049
,
44
(
1997
).
Google Scholar
Crossref
Search ADS
 
30.
H.
Ito
,
D.
Alexander
, and
G.
Breyta
,
J. Photopolym. Sci. Technol.
10
,
397
(
1997
).
Google Scholar
Crossref
Search ADS
 
31.
Y.
Suzuki
and
D. W.
Johnson
,
Proc. SPIE
3333
,
735
(
1998
).
Google Scholar
Crossref
Search ADS
 
32.
S.
Hien
,
G.
Czech
,
W. D.
Domke
,
H.
Raske
,
M.
Sebald
, and
I.
Stiebert
,
Proc. SPIE
3333
,
154
(
1998
).
Google Scholar
Crossref
Search ADS
 
33.
R. D.
Allen
,
I. Y.
Wan
,
G. M.
Wallraff
,
R. A.
DiPietro
,
D. C.
Hofer
, and
R. R.
Kunz
,
ACS Symp. Ser.
614
,
255
(
1995
).
Google Scholar
Crossref
Search ADS
 
34.
T.
Naito
,
K.
Asakawa
,
N.
Shida
,
T.
Ushirogouchi
, and
M.
Hakase
,
Jpn. J. Appl. Phys., Part 1
33
,
7028
(
1994
).
Google Scholar
Crossref
Search ADS
 
35.
S. Watanabe, O. Watanabe, T. Furihata, Y. Takeda, S. Nagura, T. Ishihara, and T. Yamaoka, European Patent Application, 82 pp. CODEN: EPXXDW. EP 908783 A1 990414.
This content is only available via PDF.
© 1999 American Vacuum Society.
1999
American Vacuum Society
You do not currently have access to this content.