This article investigates plasma treatment of vertically aligned multiwall carbon nanotube (CNT) films in different plasma environments for modification of surface chemistry and morphology. The surfaces of the CNTs were functionalized with a pulsed dc plasma treatment, where the power was directly applied to the nanotube film in low pressure argon/nitrogen and argon/hydrogen backgrounds. Optical emission spectroscopy was used to detect atomic and molecular excitations in the gas mixtures as well as in pure gases in the vicinity of the CNT films. In situ x-ray photoelectron spectroscopy was performed on the treated samples to examine CNT surface chemistry after treatment. The analysis of CNT films after nitrogen and hydrogen treatment indicated formation of both and bonds, respectively. Correlations of the plasma characteristics to the surface chemistry and morphology of the CNT surfaces are discussed.
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May 2008
This content was originally published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Research Article|
May 08 2008
Nitrogen and hydrogen plasma treatments of multiwalled carbon nanotubes
J. G. Jones;
J. G. Jones
a)
Air Force Research Laboratory
, Materials and Manufacturing Directorate Wright-Patterson AFB, Ohio 45433-7746
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A. R. Waite;
A. R. Waite
UTC/Air Force Research Laboratory
, Materials and Manufacturing Directorate Wright-Patterson AFB, Ohio 45433-7746
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C. Muratore;
C. Muratore
UTC/Air Force Research Laboratory
, Materials and Manufacturing Directorate Wright-Patterson AFB, Ohio 45433-7746
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A. A. Voevodin
A. A. Voevodin
Air Force Research Laboratory
, Materials and Manufacturing Directorate Wright-Patterson AFB, Ohio 45433-7746
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a)
Author to whom correspondence should be addressed. Electronic mail: john.jones@wpafb.af.mil
J. Vac. Sci. Technol. B 26, 995–1000 (2008)
Article history
Received:
July 20 2007
Accepted:
March 31 2008
Citation
J. G. Jones, A. R. Waite, C. Muratore, A. A. Voevodin; Nitrogen and hydrogen plasma treatments of multiwalled carbon nanotubes. J. Vac. Sci. Technol. B 1 May 2008; 26 (3): 995–1000. https://doi.org/10.1116/1.2917068
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