Structural Analysis of the SiO2/Si(100) Interface by Means of Photoelectron Diffraction

S. Dreiner, M. Schürmann, and C. Westphal
Phys. Rev. Lett. 93, 126101 – Published 16 September 2004

Abstract

The local environment of Si atoms at the interface between a thermally grown SiO2 film and Si(100) was studied by angle-scanned photoelectron diffraction. Experimental photoelectron diffraction patterns for each Si oxidation state were obtained from the results of least squares fitting on Si 2p core-level spectra. A comparison of the diffraction patterns with multiple-scattering calculations including an R-factor analysis was performed. An excellent agreement between experimental and simulated data was achieved within the proposed bridge-bonded interface model [Yuhai Tu and J. Tersoff, Phys. Rev. Lett. 84, 4393 (2000).].

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  • Received 20 April 2004

DOI:https://doi.org/10.1103/PhysRevLett.93.126101

©2004 American Physical Society

Authors & Affiliations

S. Dreiner1,2, M. Schürmann1, and C. Westphal1

  • 1Universität Dortmund, Lehrstuhl für Experimentelle Physik I, Otto-Hahn-Str. 4, 44221 Dortmund, Germany
  • 2Westfälische Wilhelms-Universität Münster, Physikalisches Institut, Wilhelm-Klemm-Str. 10, 48149 Münster, Germany

Comments & Replies

Dreiner, Schürmann, and Westphal Reply:

S. Dreiner, M. Schürmann, and C. Westphal
Phys. Rev. Lett. 94, 189602 (2005)

Comment on “Structural Analysis of the SiO2/Si(100) Interface by Means of Photoelectron Diffraction”

Angelo Bongiorno and Alfredo Pasquarello
Phys. Rev. Lett. 94, 189601 (2005)

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Vol. 93, Iss. 12 — 17 September 2004

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