Hydrogen-induced metastable changes in the electrical conductivity of polycrystalline silicon

N. H. Nickel, N. M. Johnson, and Chris G. Van de Walle
Phys. Rev. Lett. 72, 3393 – Published 23 May 1994
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Abstract

Measurements of the dark electrical conductivity σD performed on hydrogenated polycrystalline silicon (poly-Si:H) reveal a cooling-rate dependent metastable increase of σD below 268 K. This nonequilibrium state relaxes slowly and the time to reach equilibrium is thermally activated with Eτ≃0.74 eV. Since thermal quenching does not affect unhydrogenated specimens, the observed metastable changes are clearly due to the formation and dissociation of an electrically active hydrogen complex. We propose that this complex consists of an isolated H atom at the bond-center site of a prestrained Si-Si bond at a grain boundary.

  • Received 17 March 1994

DOI:https://doi.org/10.1103/PhysRevLett.72.3393

©1994 American Physical Society

Authors & Affiliations

N. H. Nickel, N. M. Johnson, and Chris G. Van de Walle

  • Xerox Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, California 94304

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Vol. 72, Iss. 21 — 23 May 1994

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