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Structural and elastic properties of zirconium nitride–aluminum nitride multilayers

W. J. Meng, G. L. Eesley, and K. A. Svinarich
Phys. Rev. B 42, 4881(R) – Published 1 September 1990
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Abstract

We have synthesized a series of zirconium nitride–aluminum nitride multilayers with a reactive sputtering technique. Structure and elastic response of these multilayers are characterized by x-ray-diffraction and transient piezoreflectance measurements. We observe a systematic decrease of the longitudinal elastic response in the direction of film growth as the composition modulation wavelength decreases. This contradicts a recent model of elastic response which predicts the absence of elastic anomaly in metal-insulator multilayers.

  • Received 30 May 1990

DOI:https://doi.org/10.1103/PhysRevB.42.4881

©1990 American Physical Society

Authors & Affiliations

W. J. Meng, G. L. Eesley, and K. A. Svinarich

  • Physics Department, General Motors Research Laboratories, Warren, Michigan 48090

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Issue

Vol. 42, Iss. 7 — 1 September 1990

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