Continuum simulations of self-organized lateral compositional modulation growth in $\mathrm{InAs}/\mathrm{AlAs}$ short-period superlattices on InP substrate are presented. The results of the simulations correspond quantitatively to the results of synchrotron x-ray diffraction experiments. The time evolution of the compositional modulation during epitaxial growth can be explained only including a nonlinear dependence of the elastic energy of the growing epitaxial layer on its thickness. From the fit of the experimental data to the growth simulations we have determined the parameters of this nonlinear dependence. It was found that the modulation amplitude does not depend on the values of the surface diffusion constants of particular elements.

• Received 11 January 2006

DOI:https://doi.org/10.1103/PhysRevLett.96.136102