Identification of the Carbon Dangling Bond Center at the 4HSiC/SiO2 Interface by an EPR Study in Oxidized Porous SiC

J. L. Cantin, H. J. von Bardeleben, Y. Shishkin, Y. Ke, R. P. Devaty, and W. J. Choyke
Phys. Rev. Lett. 92, 015502 – Published 8 January 2004

Abstract

We report the observation of a paramagnetic interface defect in thermally oxidized porous n-type doped 4HSiC/SiO2. Based on its axial symmetry and resolved hyperfine interactions it is attributed to an sp3 carbon dangling bond center situated at the SiC side of the interface. This center is electrically active and pins the Fermi level in the oxidized samples. No silicon related paramagnetic dangling bond centers are observed. The formation of dangling bond centers seems to be related to interstitial oxygen diffusion at the interface during the oxidation process.

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  • Received 24 July 2003

DOI:https://doi.org/10.1103/PhysRevLett.92.015502

©2004 American Physical Society

Authors & Affiliations

J. L. Cantin1, H. J. von Bardeleben1, Y. Shishkin2, Y. Ke2, R. P. Devaty2, and W. J. Choyke2

  • 1Groupe de Physique des Solides, Universités Paris 6&7, UMR 7588 au CNRS, 2, place Jussieu, 75005 Paris, France
  • 2Department of Physics and Astronomy, University of Pittsburgh, Pittsburgh, Pennsylvania 15260, USA

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Issue

Vol. 92, Iss. 1 — 9 January 2004

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