Phys. Rev. Lett. 86, 5514 - 5517 (2001)

Absence of an Abrupt Phase Change from Polycrystalline to Amorphous in Silicon with Deposition Temperature

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P. M. Voyles1,2 *, J. E. Gerbi3, M. M. J. Treacy2, J. M. Gibson4, and J. R. Abelson3
1Department of Physics, University of Illinois, 1110 West Green Street, Urbana, Illinois 61801
2NEC Research Institute, 4 Independence Way, Princeton, New Jersey 08540
3Department of Materials Science and Engineering and Coordinated Science Lab, University of Illinois, 1101 West Springfield Avenue, Urbana, Illinois 61801
4Materials Science Division, Argonne National Laboratory, 9700 Cass Avenue, Argonne, Illinois 60439

Received 16 October 2000

Using fluctuation electron microscopy, we have observed an increase in the mesoscopic spatial fluctuations in the diffracted intensity from vapor-deposited silicon thin films as a function of substrate temperature from the amorphous to polycrystalline regimes. We interpret this increase as an increase in paracrystalline medium-range order in the sample. A paracrystal consists of topologically crystalline grains in a disordered matrix; in this model the increase in ordering is caused by an increase in the grain size or density. Our observations are counter to the previous belief that the amorphous to polycrystalline transition is a discontinuous disorder-order phase transition.


©2001 The American Physical Society

URL: http://link.aps.org/abstract/PRL/v86/p5514
DOI: 10.1103/PhysRevLett.86.5514
PACS: 61.43.Dq, 64.70.Kb, 68.55.Jk

* Current address: Bell Laboratories, Lucent Technologies, Murray Hill, NJ 07974.

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