Electron acoustic waves in capacitively coupled, low-pressure rf glow discharges

M. Surendra and D. B. Graves
Phys. Rev. Lett. 66, 1469 – Published 18 March 1991
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Abstract

Particle-in-cell Monte Carlo simulations of rf glow discharges between parallel-plate electrodes reveal the possibility of negative period-averaged power deposited into electrons in the body of the glow. A two-fluid model of fast- and slow-electron transport demonstrates that fast electrons are compressed at the plasma-sheath boundary by the expanding sheath and are rarefied at the other (collapsing) sheath, resulting in a fast-electron density gradient through the plasma. The resulting electron acoustic waves are the key to understanding electron cooling in the body of the glow.

  • Received 14 December 1990

DOI:https://doi.org/10.1103/PhysRevLett.66.1469

©1991 American Physical Society

Authors & Affiliations

M. Surendra and D. B. Graves

  • Department of Chemical Engineering, University of California, Berkeley, Berkeley, California 94720

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Vol. 66, Iss. 11 — 18 March 1991

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