An EPR spectrum, labeled Si-$G12\mathrm{}$, is identified as arising from an isolated interstitial carbon atom in silicon. A $〈100〉$ C-Si interstitialcy model is suggested for the defect in which a silicon and carbon atom pair partially share single substitutional site. Because carbon is isoelectronic with silicon, these results suggest a similar $〈100〉$ Si-Si interstitialcy configuration for the silicon self-interstitial, a fundamental defect which has so far eluded direct detection.

• Received 12 April 1976

DOI:https://doi.org/10.1103/PhysRevLett.36.1329