Phys. Rev. E 70, 056413 (2004) - Collective Thomson scattering experiments on a tin vapor discharge in the prepinch phase

Collective Thomson scattering experiments on a tin vapor discharge in the prepinch phase

E. R. Kieft, J. J. A. M. van der Mullen, G. M. W. Kroesen, V. Banine, and K. N. Koshelev

Phys. Rev. E 70, 056413 – Published 30 November 2004

Abstract

Partially collective Thomson scattering measurements have been performed on a triggered vacuum arc in tin vapor, which is a candidate source of extreme ultraviolet light for application in semiconductor lithography. In this paper, results on the electron densities and temperatures are presented for the prepinch phase of the discharge. Electron densities and temperatures increase from $1 \times 10^{23} m^{- 3} to 1 \times 10^{24} m^{- 3}$ and from $5 eV$ to over $30 eV$ , respectively, in about $100 ns$ . The results are confirmed by Stark broadening data.

Received 18 June 2004

DOI:https://doi.org/10.1103/PhysRevE.70.056413

©2004 American Physical Society

Authors & Affiliations

E. R. Kieft^*, J. J. A. M. van der Mullen^†, and G. M. W. Kroesen

Department of Applied Physics, Eindhoven University of Technology, P. O. Box 513, 5600 MB Eindhoven, The Netherlands

ASML Netherlands B.V., De Run 6501, 5504 DR Veldhoven, The Netherlands

ISAN, Troitsk, Moscow Region 142092, Russia

^*Electronic address: e.r.kieft@tue.nl
^†Corresponding author; electronic address: j.j.a.m.v.d.mullen@tue.nl

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Issue

Vol. 70, Iss. 5 — November 2004

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