Sputtering of indium using Aum projectiles: Transition from linear cascade to spike regime

A. V. Samartsev, A. Duvenbeck, and A. Wucher
Phys. Rev. B 72, 115417 – Published 14 September 2005

Abstract

We have investigated the yields and emission velocity distributions of neutral In atoms and In2 dimers sputtered from a pure indium surface under bombardment with Aum(m=1,2,3) projectile ions. It is shown that 5keV Au1 bombardment leads to results in full compliance with linear cascade sputtering theory. All polyatomic projectiles are found to generate an additional low-energy contribution to the sputtered flux, which increases with increasing projectile nuclearity and energy and completely dominates the spectra under 10keV Au3 bombardment. Analysis shows that this contribution cannot be explained in terms of thermal spike sputtering models. Instead, the results indicate a spike emission mechanism, which closely resembles a free expansion of a supercritically heated subsurface volume.

  • Figure
  • Figure
  • Figure
  • Figure
  • Figure
  • Figure
  • Figure
2 More
  • Received 1 February 2005

DOI:https://doi.org/10.1103/PhysRevB.72.115417

©2005 American Physical Society

Authors & Affiliations

A. V. Samartsev, A. Duvenbeck, and A. Wucher

  • Department of Physics, University of Duisburg—Essen, 47048 Duisburg, Germany

Article Text (Subscription Required)

Click to Expand

References (Subscription Required)

Click to Expand
Issue

Vol. 72, Iss. 11 — 15 September 2005

Reuse & Permissions
Access Options
Author publication services for translation and copyediting assistance advertisement

Authorization Required


×
×

Images

×

Sign up to receive regular email alerts from Physical Review B

Log In

Cancel
×

Search


Article Lookup

Paste a citation or DOI

Enter a citation
×