Abstract
We have investigated the yields and emission velocity distributions of neutral In atoms and dimers sputtered from a pure indium surface under bombardment with projectile ions. It is shown that bombardment leads to results in full compliance with linear cascade sputtering theory. All polyatomic projectiles are found to generate an additional low-energy contribution to the sputtered flux, which increases with increasing projectile nuclearity and energy and completely dominates the spectra under bombardment. Analysis shows that this contribution cannot be explained in terms of thermal spike sputtering models. Instead, the results indicate a spike emission mechanism, which closely resembles a free expansion of a supercritically heated subsurface volume.
2 More- Received 1 February 2005
DOI:https://doi.org/10.1103/PhysRevB.72.115417
©2005 American Physical Society