The anisotropic growth morphology of obliquely evaporated amorphous Ge${\mathrm{Se}}_3$ thin films has been studied by small-angle neutron scattering. Films deposited at 80° to the normal contain ellipsoidal voids 240 Å in length and 120 Å in diameter inclined at 70° to the normal, and which account for 47% of the volume. Absorption of band-gap light reduces the level and anisotropy of the scattering. The ellipsoidal voids collapse to form smaller spherical voids distributed isotropically.

• Received 25 April 1983

DOI:https://doi.org/10.1103/PhysRevB.28.1174