Abstract
An optomechanical sensor suitable for the study of quantum effects has been developed and characterized. The sensor reads out the vibrations of a microfabricated miniature silicon mechanical oscillator which forms one end mirror of a high finesse Fabry-Pérot cavity. The mechanical quality factor is up to at 300 K and rises up to at 4 K. The thermal noise of the oscillator has been measured in the time and frequency domains at room temperature and at 4.5 K. The prospects for observing the standard quantum limit are discussed.
- Received 2 September 1997
DOI:https://doi.org/10.1103/PhysRevA.59.1038
©1999 American Physical Society